Inorganic-Organic Composites (Ormocers) as Structured Layers for Microelectronics
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Enhanced integration, faster signal transmission and reduced size of mounting devices in components for microelectronics requires new patternable materials. Inorganic-organic copolymers (ORMOCERs = ORganically MOdified CERamics), prepared by sol-gel techniques have been developed for interconnection technologies in microelectronics. Photopolymerization is enabled by unsaturated hydrocarbon or epoxide substituents and UV-sensitive initiators. Using a frequency doubled Argonion laser at 257 nm for direct laser writing, patterned layers with high edge quality have been realized. In combination with high breakthrough voltages, low permittivity constants and high bulk resistivities they open interesting aspects for very large system integration techniques (VLSI).Keywords
This publication has 3 references indexed in Scilit:
- Comparison of Wafer Scale Integration with VLSI Packaging ApproachesIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1987
- Plastics for ElectronicsPublished by Springer Nature ,1985
- Measurement of the μm sized radius of Gaussian laser beam using the scanning knife-edgeApplied Optics, 1975