Stress in the components of a thin film silicon monoxide capacitor and its relationship to dielectric loss
- 1 June 1969
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 4 (6) , 526-531
- https://doi.org/10.1007/bf00550213
Abstract
No abstract availableKeywords
This publication has 22 references indexed in Scilit:
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- Vacuum deposition of dielectric films for capacitorsVacuum, 1959
- Preparation, Structure, and Applications of Thin Films of Silicon Monoxide and Titanium DioxideJournal of the American Ceramic Society, 1950