Diamond replicas from microstructured silicon masters
- 9 March 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 73 (1-2) , 24-29
- https://doi.org/10.1016/s0924-4247(98)00250-7
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Technology Of Diamond Microelctromechanical SystemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- The fine patterning of diamond thin filmPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Fabrication of integrated diamond cantilevers with tips for SPM applicationsDiamond and Related Materials, 1997
- Direct current bias applied to hot flame diamond deposition produces smooth low friction coatingsWear, 1996
- Nucleation and growth of diamond films on Mo and Cu substratesDiamond and Related Materials, 1996
- Residual stress, Young's modulus and fracture stress of hot flame deposited diamondThin Solid Films, 1995
- Hot filament scaling-up for CVD diamond burr manufacturingSurface and Coatings Technology, 1995
- Characterization of polycrystalline diamond thin films grown on various substratesThin Solid Films, 1992
- Growth of diamond particles from methane-hydrogen gasJournal of Materials Science, 1982
- Man-Made DiamondsNature, 1955