Phase formation and microstructure changes in tantalum thin films induced by bias sputtering
- 15 July 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (2) , 1008-1014
- https://doi.org/10.1063/1.354946
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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