Effects of ion mixing on Al-Si contacts
- 1 April 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 126 (3-4) , 241-249
- https://doi.org/10.1016/0040-6090(85)90317-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Al-Si contacts formed by ion irradiation and post-annealingApplied Physics Letters, 1983
- Contact resistance: Al and Al–Si to diffused N+ and P+ siliconJournal of Vacuum Science & Technology A, 1983
- Dissolution of amorphous silicon into solid aluminumJournal of Vacuum Science and Technology, 1978
- SLT Device Metallurgy and its Monolithic ExtensionIBM Journal of Research and Development, 1969