High temperature surface degradation of III–V nitrides

• 1 November 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (6) , 3523-3531
• https://doi.org/10.1116/1.588792

Abstract

Keywords

• ELECTRIC CONDUCTIVITY
• MATERIALS SCIENCE
• ANNEALING
• STOICHIOMETRY
• ROUGHNESS