Infra-red light modulator of ridge-type optical waveguide structure using effect of free-carrier absorption

Abstract
An experimental study of optical modulation of 10.6 μm infra-red CO2 laser light using the effect of free-carrier absorption is performed. The modulator has a ridge-type optical waveguide structure having the electrodes for the carrier injection. In this modulating electrode, the tunnel MIS structure is used because it can effectively inject the minority carrier. It becomes clear that a fairly high degree of modulation up to 62% can be realised by such a structure.

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