Semiconductor-based electret sensors for sound and pressure
- 1 April 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electrical Insulation
- Vol. 24 (2) , 267-276
- https://doi.org/10.1109/14.90285
Abstract
The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 HKeywords
This publication has 4 references indexed in Scilit:
- Research and development of miniaturized electretsIEEE Transactions on Electrical Insulation, 1989
- The pressfet: an integrated electret-mosfet based pressure sensorSensors and Actuators, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- ElectretsPublished by Springer Nature ,1980