Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macroporous silicon
- 6 November 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 77 (19) , 2943-2945
- https://doi.org/10.1063/1.1322630
Abstract
We report on the fabrication of three-dimensional (3D) Yablonovite-like photonic crystals by focused-ion-beam (FIB) etching of macroporous silicon. Crystals containing up to 25×25×5 lattice cells are fabricated with a submicronic period of ∼0.75 μm. Photonic band gaps at wavelengths close to 3 μm are demonstrated from reflection measurements and confirmed by numerical calculations. The combination of plasma or chemical etching with FIB micromachining appears to be promising for the fabrication of a large variety of multiple-period 3D photonic crystals at optical wavelengths.Keywords
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