Step height measurement using two-wavelength phase-shifting interferometry

15 July 1987

journal article
Published by Optica Publishing Group in Applied Optics

Vol. 26 (14) , 2810-2816
https://doi.org/10.1364/ao.26.002810

Abstract

Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.

Keywords

This publication has 6 references indexed in Scilit:

Contouring Aspheric Surfaces Using Two-wavelength Phase-shifting Interferometry
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