MCM substrate with high capacitance

• 1 January 1995
• journal article
• Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B
• Vol. 18  (1) , 23-27
• https://doi.org/10.1109/96.365477

Abstract

Keywords

• ALUMINA
• MCM SUBSTRATES
• THIN FILM CAPACITORS
• CERAMIC
• CO FIRED
• HIGH FREQUENCY