X-ray emission analysis in the electron microscope

Abstract
The technique by which sample-emitted X-rays are recorded in the electron microscope is assessed. Although the method is relatively insensitive for elements of low atomic number, its applicability in the field of s imultaneous structural and compositional investigations is discussed, together with a critical examination of the analytical precision possible. Various examples of its use are described, including some where structure and stoichiometry can be determined in crystals containing fewer than 10 10 atoms.