Growth mechanisms of DLC films from C+ ions: experimental studies
- 1 April 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (4) , 318-323
- https://doi.org/10.1016/0925-9635(94)05205-0
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- Hydrogen-free amorphous carbon preparation and propertiesDiamond and Related Materials, 1994
- Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbonJournal of Applied Physics, 1994
- Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energyPhysical Review B, 1993
- Microstructure of amorphic diamond filmsJournal of Applied Physics, 1991
- Subplantation model for film growth from hyperthermal speciesPhysical Review B, 1990
- Subplantation model for film growth from hyperthermal species: Application to diamondPhysical Review Letters, 1989
- Negative ion source (NIABNIS) and preparation of transparent carbon films by negative carbon ion beam depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Preparation and structure of carbon film deposited by a mass-separated C+ ion beamJournal of Applied Physics, 1984
- The epitaxial synthesis of diamond by the deposition of low energy carbon ionsVacuum, 1984
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971