Measurement of heavy negative ion production probabilities by sputtering
- 1 January 1992
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 287 (1) , 66
- https://doi.org/10.1063/1.44812
Abstract
Heavy negative ion production probabilities by Xe+ sputtering on a cesiated sputtering surface were measured. The production probabilities were strongly affected by the cesiated surface condition which was determined by a flux of neutral cesium supply to the surface and a target surface temperature. The measured maximum production probabilities at the optimal condition were considerably high and were about 10% or more for Cu, C, Si, Ge, and W targets and about 1% for Ta and Mo targets.Keywords
This publication has 0 references indexed in Scilit: