Signatures of the Bohm and sheath velocities in minority-light-ion energy distributions
- 1 April 1995
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review E
- Vol. 51 (4) , 3480-3483
- https://doi.org/10.1103/physreve.51.3480
Abstract
The energy distributions of light minority ions impinging on the walls of a radio frequency plasma are obtained numerically by integrating trajectories in a self-consistent electric field. The distributions are found to contain features which can be directly related to the Bohm and sheath velocities. The genesis of these features is considered and a comparison is made to experimentally determined distributions in a mixture of argon and 8% helium.Keywords
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