Comb/serpentine/cross-bridge Test Structure For Fabrication Process Evaluation
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Bridge and van der Pauw Sheet Resistors for Characterizing the Line Width of Conducting LayersJournal of the Electrochemical Society, 1978
- Screening of Metallization Step Coverage on Integrated Circuits8th Reliability Physics Symposium, 1973