A High-Yield Photolithographic Technique for Surface Wave Devices

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (5) , 821
• https://doi.org/10.1149/1.2408173

Abstract

Keywords

• SURFACE WAVE DEVICES
• HIGH YIELD PHOTOLITHOGRAPHIC
• YIELD PHOTOLITHOGRAPHIC TECHNIQUE