The effects of hydrogen bonds on the adhesion of inorganic oxide particles on hydrophilic silicon surfaces

Hydrogen bonds have a dominant effect on the adhesion of inorganic oxide particles, such as ${\mathrm{SiO}}_{\mathrm{2}}$ and ${\mathrm{Al}}_{\mathrm{2}}{\mathrm{O}}_{\mathrm{3}},$ to hydrophilic silicon surfaces. An analysis of adhesion forces due to hydrogen bonds between particle and substrate surfaces has been carried out, and is used to interpret the efficiencies of removing polystyrene latex, ${\mathrm{SiO}}_{\mathrm{2}},$ and ${\mathrm{Al}}_{\mathrm{2}}{\mathrm{O}}_{\mathrm{3}}$ particles from a hydrophilic silicon surface by laser cleaning. Evidence of the dominant effect of hydrogen bonding was confirmed by using alcohol instead of water during particle deposition.