Microassembly of a Piezoelectric Miniature Motor

• 1 January 1999
• journal article
• Published by Springer Nature in Journal of Electroceramics
• Vol. 3  (1) , 73-83
• https://doi.org/10.1023/a:1009971001001

Abstract

Keywords

• PIEZOELECTRIC
• FABRICATION
• MINIATURE MOTOR
• JOINT
• SOLDERING
• MPA
• TORQUE
• AXES