A flange-on type low energy electron microscope

Publisher Website
Google Scholar
Abstract
A small low energy electron microscope in which the specimen is at ground potential and which can be mounted on any ultrahigh vacuum system equipped with a 6 in. Conflat flange is described. It has an all‐electrostatic lens system and a magnetic beam separator which does not rotate the electron spin polarization so that the instrument can be used not only for low energy electron microscopy (LEEM) but also for spin‐polarized LEEM (SPLEEM). In addition, low energy electron diffraction, mirror electron microscopy, and photoelectron emission microscopy is possible. The theoretical resolution in (SP)LEEM is better than 10 nm at electron energies of a few eV. In the version described here a specimen manipulator with four piezoelectrically and one mechanically controlled degrees of freedom is integrated in the instrument which allows for optimum magnetic shielding.