Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films using Capacitive Bridges

1 January 1992

journal article
Published by Springer Nature in MRS Proceedings

Vol. 276
https://doi.org/10.1557/proc-276-203

Abstract

We extend the method of Najafi and Suzuki [1] for the electronic determination of the modulus of elasticity and intrinsic stress of thin films using capacitive bridge structures. New theoretical concepts are introduced. The extended method does not require that the test structures be exercised to the point of snap-action.

Keywords

THERMAL EXPANSION
THIN FILM
FINITE ELEMENT METHOD
MODULUS OF ELASTICITY
THREE DIMENSIONAL

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