Anisotropic crystal etching: A simulation program
- 31 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3) , 267-274
- https://doi.org/10.1016/0924-4247(92)80115-j
Abstract
No abstract availableKeywords
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- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978
- Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching ShapesJournal of Applied Physics, 1962