UHV-SEM observations of cleaning process and step formation on silicon (111) surfaces by annealing
- 1 August 1985
- journal article
- Published by Elsevier in Surface Science
- Vol. 159 (1) , 256-264
- https://doi.org/10.1016/0039-6028(85)90115-3
Abstract
No abstract availableFunding Information
- Ministry of Education
This publication has 4 references indexed in Scilit:
- Observation of Surface Micro-Structures by Micro-Probe Reflection High-Energy Electron DiffractionJapanese Journal of Applied Physics, 1984
- Image contrast of dislocations and atomic steps on (111) silicon surface in reflection electron microscopySurface Science, 1981
- Reflection electron microscopy of clean and gold deposited (111) silicon surfacesSurface Science, 1980
- Surface Processes in the Growth of Silicon on (111) Silicon in Ultrahigh VacuumJournal of Applied Physics, 1968