Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams
- 1 November 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (11) , 1295-1302
- https://doi.org/10.1016/0925-9635(96)00541-9
Abstract
No abstract availableKeywords
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