Zirconium nitride films prepared by cathodic arc plasma deposition process
- 1 December 1987
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 33, 53-62
- https://doi.org/10.1016/0257-8972(87)90176-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- TiN‐coated high‐speed steel cutting toolsJournal of Vacuum Science & Technology A, 1986
- Evolution avec la température de la réflectivité, de l'indice complexe et de la sélectivité spectrale du nitrure de zirconiumOptics Communications, 1986
- Very high rate reactive sputtering of TiN, ZrN and HfNThin Solid Films, 1983
- The crystal growth of the transition metal compounds TiC, TiN, and ZrN by a floating zone techniqueJournal of Crystal Growth, 1976