Very high rate reactive sputtering of TiN, ZrN and HfN
- 1 September 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 107 (2) , 141-147
- https://doi.org/10.1016/0040-6090(83)90016-0
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Adhesion studies of ion-plated TiN on steelThin Solid Films, 1981
- The adhesion of chemically vapour-deposited hard coatings to steel—the scratch testThin Solid Films, 1981
- Preparation of titanium nitride by a pulsed d.c. magnetron reactive deposition techniques using the moving mode of depositionThin Solid Films, 1980
- Advances in high rate sputtering with magnetron-plasmatron processing and instrumentationThin Solid Films, 1979