First-principles study of the structural phase transformation of hafnia under pressure
- 7 August 2003
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 68 (5) , 054106
- https://doi.org/10.1103/physrevb.68.054106
Abstract
We investigate the phase transformation of under hydrostatic pressure through first-principles pseudopotential calculations within the local-density-functional approximation (LDA) and the generalized gradient approximation (GGA). We find that with increasing of pressure, undergoes a series of structural transformations from monoclinic to orthorhombic I and then to orthorhombic II, consistent with experiments. The calculated transition pressures within the GGA are in good agreement with the measured values, while they are severely underestimated by the LDA. Analyzing the distribution of electron densities for the high-pressure phases, we find that the electron densities of the orthorhombic-II phase are more homogeneous than for the orthorhombic-I phase. Due to this distinct difference in the homogeneity of electron densities, the energy difference between the orthorhombic-I and orthorhombic-II phases is enhanced in the GGA; thus, the transition pressure between the two phases increases significantly.
Keywords
This publication has 24 references indexed in Scilit:
- First-principles study of structural, vibrational, and lattice dielectric properties of hafnium oxidePhysical Review B, 2002
- Vacancy and interstitial defects in hafniaPhysical Review B, 2002
- Thermodynamic stability of high-K dielectric metal oxides ZrO2 and HfO2 in contact with Si and SiO2Applied Physics Letters, 2002
- Phase Relations and Volume Changes of Hafnia under High Pressure and High TemperatureJournal of the American Ceramic Society, 2001
- Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealingApplied Physics Letters, 2000
- Dynamic scaling of the submonolayer island size distribution during self-assembled monolayer growthPhysical Review B, 1999
- High-densityandCrystalline structures and equations of statePhysical Review B, 1999
- Application of generalized gradient approximations: The diamond–β-tin phase transition in Si and GePhysical Review B, 1995
- Pressure-induced phase transformations into 50 GPa studied by Raman spectroscopyPhysical Review B, 1993
- Pressure-induced phase transitions and volume changes inup to 50 GPaPhysical Review B, 1993