Nanomechanics of Thin Films: Emphasis: Tensile Properties
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- The structure-mechanical property relationship of amorphous silicon monoxide thin filmsThin Solid Films, 1987
- Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal historyIEEE Transactions on Electron Devices, 1987
- Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniquesJournal of Materials Research, 1986
- Nanomechanics of Thin FilmsMRS Proceedings, 1986
- Elasticity modulus Ef and temperature expansion coefficient αf of aluminium thin films measured by a new methodThin Solid Films, 1984
- Low temperature strain behavior of Pb thin films on a substrateMetallurgical Transactions A, 1982
- Determination of Young's modulus in vacuum-evaporated thin films of aluminium and silverThin Solid Films, 1981
- Hillock formation in lead films by grain boundary slidingPhilosophical Magazine A, 1980
- Mechanical Properties of Vacuum-Deposited Gold FilmsJournal of Applied Physics, 1964