Applications of micron-scale passive diamond layers for the integrated circuits and microelectromechanical systems industries
Open Access
- 31 January 1998
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 7 (1) , 1-14
- https://doi.org/10.1016/s0925-9635(97)00199-4
Abstract
No abstract availableThis publication has 43 references indexed in Scilit:
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