Study of sputtered HfO2 thin films on silicon
- 1 June 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 213 (2) , 257-264
- https://doi.org/10.1016/0040-6090(92)90291-i
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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