Adhesion of Cyclotene™ (BCB) Coatings on Silicon Substrates
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Cure Technology for Controlled Stress in Thin Benzocyclobutene CoatingsMRS Proceedings, 1992
- The Processing and Properties of Multilayer Interconnection Structures Using Thermoset Films Derived from Bisbenzocyclobutene.MRS Proceedings, 1989
- The determination of bond strength of polymeric films by indentation debondingJournal of Adhesion Science and Technology, 1988