Light ion bombardment sputtering, stress buildup, and enhanced surface contamination
- 1 September 1974
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 53, 226-230
- https://doi.org/10.1016/0022-3115(74)90248-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Simultaneous Thin-Film Stress and Mass-Change Measurements Using Quartz ResonatorsJournal of Applied Physics, 1972
- Effect of Thin Carbonaceous Films on 500-keV Helium Ion Sputtering of CopperJournal of Applied Physics, 1965
- Surface Cleaning by Cathode SputteringJournal of Applied Physics, 1960