Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1197-1200
- https://doi.org/10.1109/sensor.1997.635420
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rateSensors and Actuators A: Physical, 1996
- Precision accelerometers with μg resolutionSensors and Actuators A: Physical, 1990
- Measurement of Angular Acceleration of a Rigid Body Using Linear AccelerometersJournal of Applied Mechanics, 1975