Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate
- 30 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 646-650
- https://doi.org/10.1016/s0924-4247(97)80031-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micromachined capacitive accelerometerSensors and Actuators A: Physical, 1991
- Precision accelerometers with μg resolutionSensors and Actuators A: Physical, 1990