A micromachined single-chip inkjet printhead
- 31 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 405-409
- https://doi.org/10.1016/0924-4247(96)80163-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Etch rate and surface roughness of deep narrow U-grooves in (110)-oriented siliconJournal of Micromechanics and Microengineering, 1995
- A fully integrated silicon-based 40-V thermal ink jet ICMicroelectronic Engineering, 1992
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978