Elastic electron backscattering for quantitative elemental analysis of laser diode structures
- 1 April 1988
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 11 (6-7) , 312-316
- https://doi.org/10.1002/sia.740110608
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Elastic peak electron spectroscopyScanning, 1986
- Beam brightness modulation (BBM) method as applied to Auger electron spectroscopySurface and Interface Analysis, 1985
- Backscattered electron imaging with scanning Auger electron spectroscopyReview of Scientific Instruments, 1983
- Techniques for the correction of topographical effects in scanning Auger electron microscopyJournal of Applied Physics, 1983
- Electron backscattering from thin filmsJournal of Applied Physics, 1982
- Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscopeJournal of Applied Physics, 1979
- Edge effect in high-resolution scanning Auger-electron microscopyApplied Physics Letters, 1978
- Scanning auger electron microscopy at 30 nm resolutionPhilosophical Magazine, 1976