Abstract
The principle of the beam brightness modulation (BBM) method, as well as such advanced characteristics as high speed response, wide dynamic range of primary beam currents, selective signal detection, and signal‐to‐noise superiority in N(E) spectra, are reported by comparing with both the conventional analyzer energy modulation and the pulse counting methods. Some device‐related technologies for the BBM method are also described as well as advantages of Auger electron spectroscopy (AES) using N(E) spectra obtained by the BBM method.