Comparative study of the oxidation of thin porous silicon layers studied by reflectometry, spectroscopic ellipsometry and secondary ion mass spectroscopy
- 31 December 1998
- journal article
- Published by Elsevier in Journal of Luminescence
- Vol. 80 (1-4) , 147-152
- https://doi.org/10.1016/s0022-2313(98)00086-6
Abstract
No abstract availableKeywords
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