Novel optical probing system with submicron spatial resolution for internal diagnosis of VLSI circuits
- 24 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 269-275
- https://doi.org/10.1109/test.1996.556971
Abstract
In this paper, we introduce a novel optical probing system for the internal diagnosis of VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-/spl mu/m spatial resolution by utilizing the scanning force microscopy technique. The optical sampling pulse width was 30 ps, and the minimum detectable voltage was as small as 10 mV. In an atmospheric environment this system can measure internal signal waveforms of VLSI circuits much faster than electron-beam testers.Keywords
This publication has 6 references indexed in Scilit:
- An automated optical on-wafer probing system for ultra-high-speed ICsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- Chapter 6 Electron-Beam ProbingPublished by Elsevier ,1990
- Chapter 4 Electro-Optic Measurement Techniques for Picosecond Materials, Devices, and Integrated CircuitsPublished by Elsevier ,1990
- A Non-contact Electro-optic Prober for High Speed Integrated CircuitsPublished by Springer Nature ,1987
- Atomic Force MicroscopePhysical Review Letters, 1986
- Function testing of bipolar ICs and LSIs with the stroboscopic scanning electron microscopeIEEE Journal of Solid-State Circuits, 1980