Novel geometrical effects observed in debris when polymers are laser sputtered
- 7 December 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (23) , 2784-2786
- https://doi.org/10.1063/1.108090
Abstract
When polymers are sputtered with 248 or 308 nm laser pulses there are two generically different responses. The most straightforward is where the emitted particles expand outwards away from the target surface obeying, in so doing, the laws of one‐dimensional adiabatic flow. The other is where the particles expand both outwards and sideways and, because a certain fraction recondenses on the target surface, there is a prominent deposit of debris lying around the bombarded spot. For spots with other than circular shape the debris show interesting symmetry in which there is rotation with respect to the spot. We show that this rotation occurs wholly through the laws of flow and we conclude, therefore, that the debris phenomenon is a purely gas‐dynamic effect. It follows that the elimination of debris can be approached in gas‐dynamic terms. We also show that the numerical extent of debris formation increases with the complexity of the particles involved, a result which suggests additional methods to control debris.Keywords
This publication has 12 references indexed in Scilit:
- On the debris phenomenon with laser-sputtered polymersApplied Physics Letters, 1992
- Gas flow dynamics in laser ablation depositionJournal of Applied Physics, 1992
- Ambient gas effects on debris formed during KrF laser ablation of polyimideApplied Physics Letters, 1992
- Primary and secondary mechanisms in laser-pulse sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- On the gas dynamics of laser-pulse sputtering of polymethylmethacrylateNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Good-quality Ge films grown by excimer laser depositionApplied Surface Science, 1990
- Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical modelPhysical Review B, 1990
- XeCl laser ablation of polyimide: Influence of ambient atmosphere on particulate and gaseous productsJournal of Applied Physics, 1989
- The effect of debris formation on the morphology of excimer laser ablated polymersJournal of Applied Physics, 1988
- Electrostatic collection of debris resulting from 193 nm laser etching of polyimideApplied Physics Letters, 1987