Cadmium–tin-oxide films deposited by dc reactive sputtering from a Cd-Sn alloy target
- 15 July 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 37 (2) , 180-182
- https://doi.org/10.1063/1.91816
Abstract
Cadmium–tin‐oxide films with high conductivity and high visible transmission were prepared by dc reactive sputtering from a Cd‐Sn alloy target in an Ar‐O2 atmosphere. The electrical and optical properties of these films were found to depend strongly uponthe oxygen concentration in an Ar‐O2 atmosphere during deposition. Films with a lowest resistivity of 2.0×10−4 Ω cm and a highest transmission of 90% over the visible region have been obtained for a 6% oxygen concentration in an Ar‐O2 atmosphere.Keywords
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