Polysilicon strain-gauge transducers
- 1 February 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 30 (3) , 219-223
- https://doi.org/10.1016/0924-4247(92)80124-l
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Piezoresistance in polysilicon and its applications to strain gaugesSolid-State Electronics, 1989
- Piezoresistive elements of polycrystalline semiconductor thin filmsSensors and Actuators, 1988
- Piezoresistive properties of polycrystalline and crystalline silicon filmsSensors and Actuators, 1987
- Polycrystalline silicon-on-metal strain gauge transducersIEEE Transactions on Electron Devices, 1983