On the applicability of Sato's equation to capacitative radio frequency sheaths

Preprint

8 October 2003

preprint
Published by arXiv in arXiv

https://doi.org/10.48550/arXiv.physics/0310038

Abstract

We show that the time dependent version of Sato's equation, when applied to capacitative rf sheaths is no longer independent of the electric field of the space charge, and discuss the use of the equation for a specific sheath model.

Keywords

CAPACITATIVE RADIO
SATO'S EQUATION
ELECTRIC FIELD
SPACE CHARGE
SHEATHS
RADIO

All Related Versions

Version 1, 2003-10-08, ArXiv
Published version: Journal of Physics D: Applied Physics, 33 (24), L153.

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