On the applicability of Sato's equation to capacitative radio frequency sheaths
- 24 November 2000
- journal article
- research article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 33 (24) , L153-L157
- https://doi.org/10.1088/0022-3727/33/24/101
Abstract
We show that the time-dependent version of Sato's equation, when applied to capacitative radio frequency sheaths, is no longer independent of the electric field of the space charge, and we discuss the use of the equation for a specific sheath model.Keywords
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This publication has 8 references indexed in Scilit:
- Ion dynamics model for collisionless radio frequency sheathsJournal of Applied Physics, 2000
- Parameter space for collisionless RF sheathsIEEE Transactions on Plasma Science, 2000
- The discharge current induced by the motion of charged particles in time-dependent electric fields; Sato's equation extendedJournal of Physics D: Applied Physics, 1999
- Dynamics of collisionless rf plasma sheathsJournal of Applied Physics, 1997
- Streamer propagation in airJournal of Physics D: Applied Physics, 1997
- Smooth plasma-sheath transition in a hydrodynamic modelIEEE Transactions on Plasma Science, 1990
- Analytical solution for capacitive RF sheathIEEE Transactions on Plasma Science, 1988
- Discharge current induced by the motion of charged particlesJournal of Physics D: Applied Physics, 1980