Oriented diamond films grown on nickel substrates
- 20 September 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (12) , 1640-1642
- https://doi.org/10.1063/1.110721
Abstract
A previously reported multistep hot filament chemical vapor deposition process for nucleating diamond directly on nickel substrates has been further refined to increase the nucleation density and improve the orientation of diamond films. The process employed heavy seeding of both 〈100〉 and 〈111〉 oriented single crystal Ni surfaces with diamond powders to enhance the nucleation density of diamond films. The deposition conditions were adjusted to allow for 〈100〉 and 〈111〉 orientations to grow on similarly oriented substrates to form nearly complete films with grain boundaries being eliminated. Thus, the technique holds promise for developing heteroepitaxial diamond films for microelectronics applications.Keywords
This publication has 9 references indexed in Scilit:
- Nickel-assisted metastable diamond formation (surface recrystallization) in a dissolution medium at atmospheric pressureSurface and Coatings Technology, 1991
- Silicon-on-insulator by graphoepitaxy and zone-melting recrystallization of patterned filmsJournal of Crystal Growth, 1983
- Diataxial growth of silicon and germaniumJournal of Crystal Growth, 1981
- Artificial epitaxy (diataxy) of silicon and germaniumActa Physica Academiae Scientiarum Hungaricae, 1979
- Carbon monolayer phase condensation on Ni(111)Surface Science, 1979
- Bulk-to-surface precipitation and surface diffusion of carbon on polycrystalline nickelSurface Science, 1976
- Equilibrium segregation of carbon to a nickel (111) surface: A surface phase transitionSurface Science, 1974
- Diamond SynthesisAdvances in Chemical Physics, 1965
- Variation with pressure of the nickel-carbon eutecticActa Metallurgica, 1964