Reliability of pulsed electron-beam-alloyed AuGe/Pt ohmic contacts on GaAs
- 1 October 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (7) , 556-558
- https://doi.org/10.1063/1.92792
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Alloying behaviour of Au-Ge/Pt ohmic contacts to GaAs by pulsed electron beam and furnace heatingElectronics Letters, 1980
- Laser-annealed ohmic contacts for GaAs microwave devicesAIP Conference Proceedings, 1979
- Laser alloying of Au-Ge ohmic contacts on GaAsAIP Conference Proceedings, 1979
- Q-switched ruby laser alloying of Ohmic contacts on gallium arsenide epilayersApplied Physics Letters, 1978
- Investigation of the Au–Ge–Ni and Au–Ge–Pt system used for alloyed contacts to GaAsJournal of Vacuum Science and Technology, 1977
- Investigation of the AuGeNi system used for alloyed contacts to GaAsSolid-State Electronics, 1977