Hydrogen Bonding in a-Si:H Prepared by Remote Hydrogen Plasma Deposition
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Molecular HD and D2 in amorphous semiconductorsJournal of Non-Crystalline Solids, 1989
- Hydrogen incorporation in silicon thin films deposited with a remote hydrogen plasmaApplied Physics Letters, 1989
- Bonded Hydrogen and Trapped H2 in a-Si1−xGex:H AlloysMRS Proceedings, 1989
- Deposition of a-Si:H Films with a Remote Hydrogen PlasmaMRS Proceedings, 1989
- Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR ComparisonMRS Proceedings, 1988
- NMR in-SiPhysical Review B, 1982
- Proton-magnetic-resonance studies of microstructure in plasma-deposited amorphous-silicon—hydrogen filmsPhysical Review B, 1981