Deposition of a-Si:H Films with a Remote Hydrogen Plasma

This publication has 6 references indexed in Scilit:

• Hydrogen incorporation in undoped microcrystalline silicon
  Applied Physics Letters, 1988
• Dependence of Hydrogen Incorporation in Undoped a-Si:H and µc-Si:H on Hydrogen Dilution During Pecvd
  MRS Proceedings, 1988
• Growth of a-Si:H Films by Remote Plasma Enhanced CVD (RPECVD)
  MRS Proceedings, 1988
• Thermal-equilibrium processes in amorphous silicon
  Physical Review B, 1987
• Growth of Amorphous and Crystalline Silicon by HR-CVD (Hydrogen Radical Enhanced CVD)
  MRS Proceedings, 1987
• Electronic transport in doped amorphous silicon
  Physical Review B, 1986