Microwave discharges produced by surface waves in argon gas
- 14 February 1987
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 20 (2) , 197-203
- https://doi.org/10.1088/0022-3727/20/2/008
Abstract
Reports on an experiment in argon discharges produced by surface waves at 2.45 GHz. A self-consistent description of these discharges at low pressure (p<10 Torr) is presented. Characteristics such as the electron density, the maintaining electric field (E), the collision frequency for momentum transfer v and the mean power required for maintaining the electron-ion pair theta are determined as functions of the product of the pressure and the plasma diameter. In particular scaling laws are verified for v and theta . It is concluded that experimental surface-wave discharges behave similarly to positive-column discharges.Keywords
This publication has 8 references indexed in Scilit:
- Large-diameter plasma columns produced by surface waves at radio and microwave frequenciesJournal of Applied Physics, 1985
- Modelling of a low-pressure plasma column sustained by a surface waveJournal of Physics D: Applied Physics, 1983
- Characteristics and energy balance of a plasma column sustained by a surface waveJournal de Physique Lettres, 1982
- Applications of energy theorems to surface waves in a plasmaJournal de Physique, 1981
- Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwaveJournal of Applied Physics, 1980
- Neutron scattering from ammonium salts. II. Reorientational motion of ammonium ions in octahedral environmentsJournal of Physics C: Solid State Physics, 1979
- Production and Applications of Microwave Surface Wave Plasma at Atmospheric Pressure*Journal of Microwave Power, 1979
- A Small Microwave Plasma Source for Long Column Production without Magnetic FieldIEEE Transactions on Plasma Science, 1975