Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Electrical characteristics of ferroelectric PZT thin films for DRAM applicationsIEEE Transactions on Electron Devices, 1992
- Ferroelectrics for non-volatile memoriesMicroelectronic Engineering, 1992